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DU Xin-kang WANG Tian-min WANG Cong CHEN Bu-liang ZHOU Long 《中国航空学报》2007,20(2):140-144
Some fundamental studies on the preparation, structure and optical properties of NbN films were carried out. NbN thin films were deposited by DC reactive magnetron sputtering at different N2 partial pressures and different substrate temperatures ranging from –50 ℃ to 600 ℃. X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM) were employed to characterize their phase com- ponents, microstructures, grain sizes and surface morphology. Optical properties inclusive of refractive indexes, extinction coefficients and transmittance of the NbN films under different sputtering conditions were measured. With the increase in the N2 partial pressure, δ-NbN phase structure gets forming and the grain size and lattice constant of the cubic NbN increasing. The deposited NbN film has relatively high values of refractive index and extinction coefficient in the wavelength ranging from 240 nm to 830 nm. Substrate tem- perature exerts notable influences on the microstructure and optical transmittance of the NbN films. The grain sizes of the δ-NbN film remarkably increase with the rise of the substrate temperature, while the transmittance of the films with the same thickness decreases. Ultra-fine granular film with particle size of several nanometers forms when the substrate is cooled to –50 ℃, and a remarkable aug- mentation of transmittance could be noticed under so low a temperature. 相似文献
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高速走丝电火花线切割工作介质性能要求研究 总被引:7,自引:0,他引:7
刘志东 《航空精密制造技术》2006,42(6):29-32
系统分析了高速走丝电火花线切割工作介质的主要性能要求,通过使用典型工作介质的切割对比,分析了线切割加工的工艺规律,指出工作介质洗涤能力是影响线切割工艺的最关键因素,对评价工作介质的优劣提出了参考意见。 相似文献
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The 2D kinetic Monte Carlo (KMC) simulation was used to study the effects of different substrate temperatures on the microstruc-ture of Ni-Cr films in the process of deposition by the electron beam physical vapor deposition (EB-PVD). In the KMC model, substrate was assumed to be a “surface” of tight-packed rows, and the simulation includes two phenomena: adatom-surface collision and adatom diffusion. While the interaction between atoms was described by the embedded atom method, the jumping energy was calculated by the molecular static (MS) calculation. The initial location of the adatom was defined by the Momentum Scheme. The results reveal that there exists a critical substrate temperature which means that the lowest packing density and the highest surface roughness structure will be achieved when the temperature is lower than the smaller critical value, while the roughness of both surfaces and the void contents keep decreasing with the substrate temperature increasing until it reaches the higher critical value. The results also indicate that the critical substrate temperature rises as the deposition rate increases. 相似文献
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介绍了液体战略导弹推进剂加注量的定量方式,论述了其存在的问题;提出了改进方向并简要介绍了方案。 相似文献
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吴波%张翥%沈剑韵%彭德林%柳松清 《宇航材料工艺》2002,32(2):47-50
讨论了Ti2AlNb基合金的熔炼特点,概括介绍了真空水冷铜坩埚感应凝壳熔炼的设备结构原理和工艺技术,结合Ti2AlNb基合金的熔炼实践,研究了合金元素的加入形式、熔炼室真空度对合金铸锭的均匀性以及合金中Al挥发烧损的影响规律。结果表明:采用水冷铜坩埚真空感应凝壳熔炼Ti2AlNb基合金,合金铸锭成分均匀性很好,随着熔炼工艺的不同,Al挥发烧损在5%~10%(质量分数)之间。 相似文献